The transparent conductive oxide films with controlled type of conduction are of great importance and their preparation is intensively studied. In our work, the preparation of such films based on doped ZnO was realized in order to achieve controlled type of conduction and high concentration of the charge carriers. Sol-gel method was used for films preparation and several dopants were tested (Sn, Li, Ni). Multilayer deposition was performed on several substrates: SiO2/Si wafers, silica-soda-lime and/or silica glasses. The structural and morphological characterization of the obtained films were done by scanning electron microscopy, X-ray diffraction, X-ray fluorescence, X-ray photoelectron spectroscopy and atomic force microscopy respectively, while spectroscopic ellipsometry and transmittance measurements were done for determination of optical properties. The selected samples with the best structural, morphological and optical properties were subjected to electrical measurement (Hall an...d Seebeck effect). In all studied cases, samples with good adherence and homogeneous morphology as well as monophasic wurtzite type structure were obtained. The optical constants (refractive index and extinction coefficient) were calculated from spectroscopic ellipsometry data using Cauchy model. Films with n- or p-type conduction were obtained depending on the composition, number of deposition and thermal treatment temperature.
Keywords:
Thin films / Sol-gel method / Sn / p type conductivity / Optical properties / Li-Ni co-doping / Li / Doped ZnO
TY - JOUR
AU - Zaharescu, M.
AU - Mihaiu, S.
AU - Toader, A.
AU - Atkinson, I.
AU - Calderon-Moreno, J.
AU - Anastasescu, M.
AU - Nicolescu, M.
AU - Duta, M.
AU - Gartner, M.
AU - Vojisavljević, Katarina
AU - Malic, Barbara
AU - Ivanov, V. A.
AU - Zaretskaya, E. P.
PY - 2014
UR - http://rimsi.imsi.bg.ac.rs/handle/123456789/816
AB - The transparent conductive oxide films with controlled type of conduction are of great importance and their preparation is intensively studied. In our work, the preparation of such films based on doped ZnO was realized in order to achieve controlled type of conduction and high concentration of the charge carriers. Sol-gel method was used for films preparation and several dopants were tested (Sn, Li, Ni). Multilayer deposition was performed on several substrates: SiO2/Si wafers, silica-soda-lime and/or silica glasses. The structural and morphological characterization of the obtained films were done by scanning electron microscopy, X-ray diffraction, X-ray fluorescence, X-ray photoelectron spectroscopy and atomic force microscopy respectively, while spectroscopic ellipsometry and transmittance measurements were done for determination of optical properties. The selected samples with the best structural, morphological and optical properties were subjected to electrical measurement (Hall and Seebeck effect). In all studied cases, samples with good adherence and homogeneous morphology as well as monophasic wurtzite type structure were obtained. The optical constants (refractive index and extinction coefficient) were calculated from spectroscopic ellipsometry data using Cauchy model. Films with n- or p-type conduction were obtained depending on the composition, number of deposition and thermal treatment temperature.
PB - Elsevier Science Sa, Lausanne
T2 - Thin Solid Films
T1 - ZnO based transparent conductive oxide films with controlled type of conduction
EP - 734
SP - 727
VL - 571
DO - 10.1016/j.tsf.2014.02.090
ER -
@article{
author = "Zaharescu, M. and Mihaiu, S. and Toader, A. and Atkinson, I. and Calderon-Moreno, J. and Anastasescu, M. and Nicolescu, M. and Duta, M. and Gartner, M. and Vojisavljević, Katarina and Malic, Barbara and Ivanov, V. A. and Zaretskaya, E. P.",
year = "2014",
abstract = "The transparent conductive oxide films with controlled type of conduction are of great importance and their preparation is intensively studied. In our work, the preparation of such films based on doped ZnO was realized in order to achieve controlled type of conduction and high concentration of the charge carriers. Sol-gel method was used for films preparation and several dopants were tested (Sn, Li, Ni). Multilayer deposition was performed on several substrates: SiO2/Si wafers, silica-soda-lime and/or silica glasses. The structural and morphological characterization of the obtained films were done by scanning electron microscopy, X-ray diffraction, X-ray fluorescence, X-ray photoelectron spectroscopy and atomic force microscopy respectively, while spectroscopic ellipsometry and transmittance measurements were done for determination of optical properties. The selected samples with the best structural, morphological and optical properties were subjected to electrical measurement (Hall and Seebeck effect). In all studied cases, samples with good adherence and homogeneous morphology as well as monophasic wurtzite type structure were obtained. The optical constants (refractive index and extinction coefficient) were calculated from spectroscopic ellipsometry data using Cauchy model. Films with n- or p-type conduction were obtained depending on the composition, number of deposition and thermal treatment temperature.",
publisher = "Elsevier Science Sa, Lausanne",
journal = "Thin Solid Films",
title = "ZnO based transparent conductive oxide films with controlled type of conduction",
pages = "734-727",
volume = "571",
doi = "10.1016/j.tsf.2014.02.090"
}
Zaharescu, M., Mihaiu, S., Toader, A., Atkinson, I., Calderon-Moreno, J., Anastasescu, M., Nicolescu, M., Duta, M., Gartner, M., Vojisavljević, K., Malic, B., Ivanov, V. A.,& Zaretskaya, E. P.. (2014). ZnO based transparent conductive oxide films with controlled type of conduction. in Thin Solid Films
Elsevier Science Sa, Lausanne., 571, 727-734.
https://doi.org/10.1016/j.tsf.2014.02.090
Zaharescu M, Mihaiu S, Toader A, Atkinson I, Calderon-Moreno J, Anastasescu M, Nicolescu M, Duta M, Gartner M, Vojisavljević K, Malic B, Ivanov VA, Zaretskaya EP. ZnO based transparent conductive oxide films with controlled type of conduction. in Thin Solid Films. 2014;571:727-734.
doi:10.1016/j.tsf.2014.02.090 .
Zaharescu, M., Mihaiu, S., Toader, A., Atkinson, I., Calderon-Moreno, J., Anastasescu, M., Nicolescu, M., Duta, M., Gartner, M., Vojisavljević, Katarina, Malic, Barbara, Ivanov, V. A., Zaretskaya, E. P., "ZnO based transparent conductive oxide films with controlled type of conduction" in Thin Solid Films, 571 (2014):727-734,
https://doi.org/10.1016/j.tsf.2014.02.090 . .
