Evaluation of the composition and morphology of a WTi/Si system processed by a picosecond laser
Samo za registrovane korisnike
2012
Autori
Petrović, Suzana MPerusko, Davor B
Radovic-Bogdanović, I
Branković, Goran
Cekada, M
Gaković, Biljana M
Jaksic, M
Trtica, Milan S
Milosavljević, Momir S
Članak u časopisu (Objavljena verzija)
Metapodaci
Prikaz svih podataka o dokumentuApstrakt
In this work we studied the influence of laser radiation on the composition, structure and morphology of WTi thin films deposited on n-type (100) silicon wafers. The films were deposited by d.c. sputtering from a 70:30 at% W-Ti target, using Ar ions, to a thickness of similar to 190 nm. Irradiation was performed with a pulsed Nd:YAG laser operating at 1064 nm, whereas the pulse duration was 150 ps. Laser fluences of 3.2 and 5.9 J/cm(2) were found to be sufficient for modification of the WTi/silicon target system. The results show: (i) ablation of WTi thin film and a Si substrate in the central zone of spots, (ii) appearance of hydrodynamic features like resolidified material, (iii) partial ablation of the WTi thin film at the periphery and (iv) appearance of thin film cracks at the far periphery. On the non-ablated areas, the laser modification induced changes in composition, such as inter-mixing of components at the WTi/Si interface with formation of silicides in both metals. Surface ...oxidation was the dominant process in the ablated areas, which is demonstrated by the presence of a SiO2 phase.
Ključne reči:
WTi coating / surface modification / oxidation / microstructure / interfaceIzvor:
Metals and Materials International, 2012, 18, 3, 457-463Izdavač:
- Korean Inst Metals Materials, Seoul
Finansiranje / projekti:
- Slovenian Research AgencySlovenian Research Agency - Slovenia
- Ministry of Science, Education and Sports of the Republic of CroatiaMinistry of Science, Education and Sports, Republic of Croatia
- Efekti dejstva laserskog zračenja i plazme na savremene materijale pri njihovoj sintezi, modifikaciji i analizi (RS-MESTD-Basic Research (BR or ON)-172019)
- Generisanje i karakterizacija nanofotonskih funkcionalnih struktura u biomedicini i informatici (RS-MESTD-Integrated and Interdisciplinary Research (IIR or III)-45016)
DOI: 10.1007/s12540-012-3012-4
ISSN: 1598-9623
WoS: 000305689900012
Scopus: 2-s2.0-84863816228
Institucija/grupa
Institut za multidisciplinarna istraživanjaTY - JOUR AU - Petrović, Suzana M AU - Perusko, Davor B AU - Radovic-Bogdanović, I AU - Branković, Goran AU - Cekada, M AU - Gaković, Biljana M AU - Jaksic, M AU - Trtica, Milan S AU - Milosavljević, Momir S PY - 2012 UR - http://rimsi.imsi.bg.ac.rs/handle/123456789/532 AB - In this work we studied the influence of laser radiation on the composition, structure and morphology of WTi thin films deposited on n-type (100) silicon wafers. The films were deposited by d.c. sputtering from a 70:30 at% W-Ti target, using Ar ions, to a thickness of similar to 190 nm. Irradiation was performed with a pulsed Nd:YAG laser operating at 1064 nm, whereas the pulse duration was 150 ps. Laser fluences of 3.2 and 5.9 J/cm(2) were found to be sufficient for modification of the WTi/silicon target system. The results show: (i) ablation of WTi thin film and a Si substrate in the central zone of spots, (ii) appearance of hydrodynamic features like resolidified material, (iii) partial ablation of the WTi thin film at the periphery and (iv) appearance of thin film cracks at the far periphery. On the non-ablated areas, the laser modification induced changes in composition, such as inter-mixing of components at the WTi/Si interface with formation of silicides in both metals. Surface oxidation was the dominant process in the ablated areas, which is demonstrated by the presence of a SiO2 phase. PB - Korean Inst Metals Materials, Seoul T2 - Metals and Materials International T1 - Evaluation of the composition and morphology of a WTi/Si system processed by a picosecond laser EP - 463 IS - 3 SP - 457 VL - 18 DO - 10.1007/s12540-012-3012-4 ER -
@article{ author = "Petrović, Suzana M and Perusko, Davor B and Radovic-Bogdanović, I and Branković, Goran and Cekada, M and Gaković, Biljana M and Jaksic, M and Trtica, Milan S and Milosavljević, Momir S", year = "2012", abstract = "In this work we studied the influence of laser radiation on the composition, structure and morphology of WTi thin films deposited on n-type (100) silicon wafers. The films were deposited by d.c. sputtering from a 70:30 at% W-Ti target, using Ar ions, to a thickness of similar to 190 nm. Irradiation was performed with a pulsed Nd:YAG laser operating at 1064 nm, whereas the pulse duration was 150 ps. Laser fluences of 3.2 and 5.9 J/cm(2) were found to be sufficient for modification of the WTi/silicon target system. The results show: (i) ablation of WTi thin film and a Si substrate in the central zone of spots, (ii) appearance of hydrodynamic features like resolidified material, (iii) partial ablation of the WTi thin film at the periphery and (iv) appearance of thin film cracks at the far periphery. On the non-ablated areas, the laser modification induced changes in composition, such as inter-mixing of components at the WTi/Si interface with formation of silicides in both metals. Surface oxidation was the dominant process in the ablated areas, which is demonstrated by the presence of a SiO2 phase.", publisher = "Korean Inst Metals Materials, Seoul", journal = "Metals and Materials International", title = "Evaluation of the composition and morphology of a WTi/Si system processed by a picosecond laser", pages = "463-457", number = "3", volume = "18", doi = "10.1007/s12540-012-3012-4" }
Petrović, S. M., Perusko, D. B., Radovic-Bogdanović, I., Branković, G., Cekada, M., Gaković, B. M., Jaksic, M., Trtica, M. S.,& Milosavljević, M. S.. (2012). Evaluation of the composition and morphology of a WTi/Si system processed by a picosecond laser. in Metals and Materials International Korean Inst Metals Materials, Seoul., 18(3), 457-463. https://doi.org/10.1007/s12540-012-3012-4
Petrović SM, Perusko DB, Radovic-Bogdanović I, Branković G, Cekada M, Gaković BM, Jaksic M, Trtica MS, Milosavljević MS. Evaluation of the composition and morphology of a WTi/Si system processed by a picosecond laser. in Metals and Materials International. 2012;18(3):457-463. doi:10.1007/s12540-012-3012-4 .
Petrović, Suzana M, Perusko, Davor B, Radovic-Bogdanović, I, Branković, Goran, Cekada, M, Gaković, Biljana M, Jaksic, M, Trtica, Milan S, Milosavljević, Momir S, "Evaluation of the composition and morphology of a WTi/Si system processed by a picosecond laser" in Metals and Materials International, 18, no. 3 (2012):457-463, https://doi.org/10.1007/s12540-012-3012-4 . .