Aerosol Deposition of Ba0.8Sr0.2TiO3 Thin Films
2009
Аутори
Branković, ZoricaBranković, Goran
Tucić, Aleksandar
Radojković, Aleksandar
Longo, Elson
Varela, JA
Чланак у часопису (Објављена верзија)
Метаподаци
Приказ свих података о документуАпстракт
In this work we optimized conditions for aerosol deposition of homogeneous, nano-grained, smooth Ba0.8Sr0.2TiO3 thin films. Investigation involved optimization of deposition parameters, namely deposition time and temperature for different substrates. Solutions were prepared from titanium isopropoxide, strontium acetate and barium acetate. Films were deposited on Si (1 0 0) or Si covered by platinum (Pt (1 1 1) /Ti/SiO2/Si). Investigation showed that the best films were obtained at substrate temperature of 85 degrees C. After deposition films were slowly heated up to 650 degrees C, annealed for 30 min, and slowly cooled. Grain size of BST films deposited on Si substrate were in the range 40-70 nm, depending on deposition conditions, while the same films deposited on Pt substrates showed mean grain size in the range 35-50 nm. Films deposited under optimal conditions were very homogeneous, crack-free, and smooth with rms roughness lower than 4 nm for both substrates.
Кључне речи:
Thin films / Roughness / Barium Strontium Titanate / Aerosol depositionИзвор:
Science of Sintering, 2009, 41, 3, 303-308Издавач:
- Međunarodni Institut za nauku o sinterovanju, Beograd
DOI: 10.2298/SOS0903303B
ISSN: 0350-820X
WoS: 000275835500008
Scopus: 2-s2.0-76649117134
Институција/група
Institut za multidisciplinarna istraživanjaTY - JOUR AU - Branković, Zorica AU - Branković, Goran AU - Tucić, Aleksandar AU - Radojković, Aleksandar AU - Longo, Elson AU - Varela, JA PY - 2009 UR - http://rimsi.imsi.bg.ac.rs/handle/123456789/315 AB - In this work we optimized conditions for aerosol deposition of homogeneous, nano-grained, smooth Ba0.8Sr0.2TiO3 thin films. Investigation involved optimization of deposition parameters, namely deposition time and temperature for different substrates. Solutions were prepared from titanium isopropoxide, strontium acetate and barium acetate. Films were deposited on Si (1 0 0) or Si covered by platinum (Pt (1 1 1) /Ti/SiO2/Si). Investigation showed that the best films were obtained at substrate temperature of 85 degrees C. After deposition films were slowly heated up to 650 degrees C, annealed for 30 min, and slowly cooled. Grain size of BST films deposited on Si substrate were in the range 40-70 nm, depending on deposition conditions, while the same films deposited on Pt substrates showed mean grain size in the range 35-50 nm. Films deposited under optimal conditions were very homogeneous, crack-free, and smooth with rms roughness lower than 4 nm for both substrates. PB - Međunarodni Institut za nauku o sinterovanju, Beograd T2 - Science of Sintering T1 - Aerosol Deposition of Ba0.8Sr0.2TiO3 Thin Films EP - 308 IS - 3 SP - 303 VL - 41 DO - 10.2298/SOS0903303B ER -
@article{ author = "Branković, Zorica and Branković, Goran and Tucić, Aleksandar and Radojković, Aleksandar and Longo, Elson and Varela, JA", year = "2009", abstract = "In this work we optimized conditions for aerosol deposition of homogeneous, nano-grained, smooth Ba0.8Sr0.2TiO3 thin films. Investigation involved optimization of deposition parameters, namely deposition time and temperature for different substrates. Solutions were prepared from titanium isopropoxide, strontium acetate and barium acetate. Films were deposited on Si (1 0 0) or Si covered by platinum (Pt (1 1 1) /Ti/SiO2/Si). Investigation showed that the best films were obtained at substrate temperature of 85 degrees C. After deposition films were slowly heated up to 650 degrees C, annealed for 30 min, and slowly cooled. Grain size of BST films deposited on Si substrate were in the range 40-70 nm, depending on deposition conditions, while the same films deposited on Pt substrates showed mean grain size in the range 35-50 nm. Films deposited under optimal conditions were very homogeneous, crack-free, and smooth with rms roughness lower than 4 nm for both substrates.", publisher = "Međunarodni Institut za nauku o sinterovanju, Beograd", journal = "Science of Sintering", title = "Aerosol Deposition of Ba0.8Sr0.2TiO3 Thin Films", pages = "308-303", number = "3", volume = "41", doi = "10.2298/SOS0903303B" }
Branković, Z., Branković, G., Tucić, A., Radojković, A., Longo, E.,& Varela, J.. (2009). Aerosol Deposition of Ba0.8Sr0.2TiO3 Thin Films. in Science of Sintering Međunarodni Institut za nauku o sinterovanju, Beograd., 41(3), 303-308. https://doi.org/10.2298/SOS0903303B
Branković Z, Branković G, Tucić A, Radojković A, Longo E, Varela J. Aerosol Deposition of Ba0.8Sr0.2TiO3 Thin Films. in Science of Sintering. 2009;41(3):303-308. doi:10.2298/SOS0903303B .
Branković, Zorica, Branković, Goran, Tucić, Aleksandar, Radojković, Aleksandar, Longo, Elson, Varela, JA, "Aerosol Deposition of Ba0.8Sr0.2TiO3 Thin Films" in Science of Sintering, 41, no. 3 (2009):303-308, https://doi.org/10.2298/SOS0903303B . .