In this work we optimized conditions for aerosol deposition of homogeneous, nano-grained, smooth Ba0.8Sr0.2TiO3 thin films. Investigation involved optimization of deposition parameters, namely deposition time and temperature for different substrates. Solutions were prepared from titanium isopropoxide, strontium acetate and barium acetate. Films were deposited on Si (1 0 0) or Si covered by platinum (Pt (1 1 1) /Ti/SiO2/Si). Investigation showed that the best films were obtained at substrate temperature of 85 degrees C. After deposition films were slowly heated up to 650 degrees C, annealed for 30 min, and slowly cooled. Grain size of BST films deposited on Si substrate were in the range 40-70 nm, depending on deposition conditions, while the same films deposited on Pt substrates showed mean grain size in the range 35-50 nm. Films deposited under optimal conditions were very homogeneous, crack-free, and smooth with rms roughness lower than 4 nm for both substrates.
TY - JOUR
AU - Branković, Zorica
AU - Branković, Goran
AU - Tucić, Aleksandar
AU - Radojković, Aleksandar
AU - Longo, Elson
AU - Varela, JA
PY - 2009
UR - http://rimsi.imsi.bg.ac.rs/handle/123456789/315
AB - In this work we optimized conditions for aerosol deposition of homogeneous, nano-grained, smooth Ba0.8Sr0.2TiO3 thin films. Investigation involved optimization of deposition parameters, namely deposition time and temperature for different substrates. Solutions were prepared from titanium isopropoxide, strontium acetate and barium acetate. Films were deposited on Si (1 0 0) or Si covered by platinum (Pt (1 1 1) /Ti/SiO2/Si). Investigation showed that the best films were obtained at substrate temperature of 85 degrees C. After deposition films were slowly heated up to 650 degrees C, annealed for 30 min, and slowly cooled. Grain size of BST films deposited on Si substrate were in the range 40-70 nm, depending on deposition conditions, while the same films deposited on Pt substrates showed mean grain size in the range 35-50 nm. Films deposited under optimal conditions were very homogeneous, crack-free, and smooth with rms roughness lower than 4 nm for both substrates.
PB - Međunarodni Institut za nauku o sinterovanju, Beograd
T2 - Science of Sintering
T1 - Aerosol Deposition of Ba0.8Sr0.2TiO3 Thin Films
EP - 308
IS - 3
SP - 303
VL - 41
DO - 10.2298/SOS0903303B
ER -
@article{
author = "Branković, Zorica and Branković, Goran and Tucić, Aleksandar and Radojković, Aleksandar and Longo, Elson and Varela, JA",
year = "2009",
abstract = "In this work we optimized conditions for aerosol deposition of homogeneous, nano-grained, smooth Ba0.8Sr0.2TiO3 thin films. Investigation involved optimization of deposition parameters, namely deposition time and temperature for different substrates. Solutions were prepared from titanium isopropoxide, strontium acetate and barium acetate. Films were deposited on Si (1 0 0) or Si covered by platinum (Pt (1 1 1) /Ti/SiO2/Si). Investigation showed that the best films were obtained at substrate temperature of 85 degrees C. After deposition films were slowly heated up to 650 degrees C, annealed for 30 min, and slowly cooled. Grain size of BST films deposited on Si substrate were in the range 40-70 nm, depending on deposition conditions, while the same films deposited on Pt substrates showed mean grain size in the range 35-50 nm. Films deposited under optimal conditions were very homogeneous, crack-free, and smooth with rms roughness lower than 4 nm for both substrates.",
publisher = "Međunarodni Institut za nauku o sinterovanju, Beograd",
journal = "Science of Sintering",
title = "Aerosol Deposition of Ba0.8Sr0.2TiO3 Thin Films",
pages = "308-303",
number = "3",
volume = "41",
doi = "10.2298/SOS0903303B"
}
Branković, Z., Branković, G., Tucić, A., Radojković, A., Longo, E.,& Varela, J.. (2009). Aerosol Deposition of Ba0.8Sr0.2TiO3 Thin Films. in Science of Sintering
Međunarodni Institut za nauku o sinterovanju, Beograd., 41(3), 303-308.
https://doi.org/10.2298/SOS0903303B
Branković Z, Branković G, Tucić A, Radojković A, Longo E, Varela J. Aerosol Deposition of Ba0.8Sr0.2TiO3 Thin Films. in Science of Sintering. 2009;41(3):303-308.
doi:10.2298/SOS0903303B .
Branković, Zorica, Branković, Goran, Tucić, Aleksandar, Radojković, Aleksandar, Longo, Elson, Varela, JA, "Aerosol Deposition of Ba0.8Sr0.2TiO3 Thin Films" in Science of Sintering, 41, no. 3 (2009):303-308,
https://doi.org/10.2298/SOS0903303B . .
