Prikaz osnovnih podataka o dokumentu
Ceramic packaging of PiezoMEMS devices
dc.creator | Belavič, Darko | |
dc.creator | Vojisavljević, Katarina | |
dc.creator | Kuscer, Danjela | |
dc.creator | Pečnik, Tanja | |
dc.creator | Zając, Jerzy | |
dc.creator | Anghelescu, Adrian | |
dc.creator | Muscalu, George | |
dc.creator | Hodnik, Marjan | |
dc.creator | Kos, Tomaž | |
dc.creator | Drnovšek, Silvo | |
dc.creator | Malic, Barbara | |
dc.date.accessioned | 2023-11-30T12:39:07Z | |
dc.date.available | 2023-11-30T12:39:07Z | |
dc.date.issued | 2017 | |
dc.identifier.uri | http://rimsi.imsi.bg.ac.rs/handle/123456789/2565 | |
dc.description.abstract | In the contributionthe design and the fabrication of two different types of ceramic packaging for PiezoMEMS devices ispresented. The first ceramic packaging is designed for housing the piezoelectric energy harvester. This packaging is made using LTCC technology and in the final application willintegrate piezoelectric device, electroniccircuit, storage capacitor and other components into the complex microsystem. The second packaging is developed for piezoelectric vibrating device as a part of water-purification system. In this case,the thick-film technology is used for electrical interconnection of piezoelectric actuators and for the hermetic watertight insulation of the system. | sr |
dc.language.iso | en | sr |
dc.relation | Slovenian Research Agency (research core funding No. P2-0105) | sr |
dc.relation | M-ERA.NET consortium of Agencies and Ministries from Slovenia, Romania and Poland | sr |
dc.rights | openAccess | sr |
dc.source | 21st European Microelectronics and Packaging Conference (EMPC) & Exhibition | sr |
dc.subject | ceramic packaging | sr |
dc.subject | MEMS | sr |
dc.subject | piezoelectric | sr |
dc.subject | LTCC | sr |
dc.subject | thick film | sr |
dc.title | Ceramic packaging of PiezoMEMS devices | sr |
dc.type | conferenceObject | sr |
dc.rights.license | ARR | sr |
dc.citation.epage | 4 | |
dc.citation.issue | 17732550 | |
dc.citation.spage | 1 | |
dc.identifier.doi | 10.23919/EMPC.2017.8346888 | |
dc.identifier.fulltext | http://rimsi.imsi.bg.ac.rs/bitstream/id/6673/bitstream_6673.pdf | |
dc.type.version | publishedVersion | sr |