Microstructural properties of PZT thin films deposited on LaNiO3-coated substrates
Нема приказа
Аутори
Branković, ZoricaBranković, Goran
Vojisavljević, Katarina
Počuča-Nešić, Milica
Srećković, Tatjana
Vasiljević-Radović, Dana
Чланак у часопису (Објављена верзија)
Метаподаци
Приказ свих података о документуАпстракт
The modified polymeric precursor method (Pechini method) was successfully used for the preparation of epitaxial and polycrystalline ferroelectric Pb(Zr0.52Ti0.48)O-3 (PZT) thin films. Films were deposited on LaNiO3 (LNO) - coated silicium (1 0 0) and platinum substrates (Pt (1 1 1)/Ti/SiO2/Si) by spin coating technique. LNO electrodes were also prepared by the Pechini method and treated under different thermal treatment conditions to obtain films with different structural and microstructural properties. Investigation of PZT microstructure was performed as a function of orientation and morphology of the bottom electrode, as well as of thermal treatment conditions. Grain size and morphology were analyzed by AIM, while the quality and orientation of PZT films were determined by GIXRD analysis. It has been found that the proposed thermal treatment on a hot plate, with slow heating rate and long annealing time, can result in the formation of epitaxial PZT films on Si and LNO-coated Si subst...rates.
Кључне речи:
thin film / thermal treatment / PZT / pechini method / LNOИзвор:
Research Trends in Contemporary Materials Science, 2007, 555, 315-+Издавач:
- Trans Tech Publications Ltd, Durnten-Zurich
Финансирање / пројекти:
- Ministry of Science and Environmental Protection of the Republic of SerbiaMinistry of Education, Science & Technological Development, Serbia
Институција/група
Institut za multidisciplinarna istraživanjaTY - JOUR AU - Branković, Zorica AU - Branković, Goran AU - Vojisavljević, Katarina AU - Počuča-Nešić, Milica AU - Srećković, Tatjana AU - Vasiljević-Radović, Dana PY - 2007 UR - http://rimsi.imsi.bg.ac.rs/handle/123456789/214 AB - The modified polymeric precursor method (Pechini method) was successfully used for the preparation of epitaxial and polycrystalline ferroelectric Pb(Zr0.52Ti0.48)O-3 (PZT) thin films. Films were deposited on LaNiO3 (LNO) - coated silicium (1 0 0) and platinum substrates (Pt (1 1 1)/Ti/SiO2/Si) by spin coating technique. LNO electrodes were also prepared by the Pechini method and treated under different thermal treatment conditions to obtain films with different structural and microstructural properties. Investigation of PZT microstructure was performed as a function of orientation and morphology of the bottom electrode, as well as of thermal treatment conditions. Grain size and morphology were analyzed by AIM, while the quality and orientation of PZT films were determined by GIXRD analysis. It has been found that the proposed thermal treatment on a hot plate, with slow heating rate and long annealing time, can result in the formation of epitaxial PZT films on Si and LNO-coated Si substrates. PB - Trans Tech Publications Ltd, Durnten-Zurich T2 - Research Trends in Contemporary Materials Science T1 - Microstructural properties of PZT thin films deposited on LaNiO3-coated substrates EP - + SP - 315 VL - 555 DO - 10.4028/www.scientific.net/MSF.555.315 ER -
@article{ author = "Branković, Zorica and Branković, Goran and Vojisavljević, Katarina and Počuča-Nešić, Milica and Srećković, Tatjana and Vasiljević-Radović, Dana", year = "2007", abstract = "The modified polymeric precursor method (Pechini method) was successfully used for the preparation of epitaxial and polycrystalline ferroelectric Pb(Zr0.52Ti0.48)O-3 (PZT) thin films. Films were deposited on LaNiO3 (LNO) - coated silicium (1 0 0) and platinum substrates (Pt (1 1 1)/Ti/SiO2/Si) by spin coating technique. LNO electrodes were also prepared by the Pechini method and treated under different thermal treatment conditions to obtain films with different structural and microstructural properties. Investigation of PZT microstructure was performed as a function of orientation and morphology of the bottom electrode, as well as of thermal treatment conditions. Grain size and morphology were analyzed by AIM, while the quality and orientation of PZT films were determined by GIXRD analysis. It has been found that the proposed thermal treatment on a hot plate, with slow heating rate and long annealing time, can result in the formation of epitaxial PZT films on Si and LNO-coated Si substrates.", publisher = "Trans Tech Publications Ltd, Durnten-Zurich", journal = "Research Trends in Contemporary Materials Science", title = "Microstructural properties of PZT thin films deposited on LaNiO3-coated substrates", pages = "+-315", volume = "555", doi = "10.4028/www.scientific.net/MSF.555.315" }
Branković, Z., Branković, G., Vojisavljević, K., Počuča-Nešić, M., Srećković, T.,& Vasiljević-Radović, D.. (2007). Microstructural properties of PZT thin films deposited on LaNiO3-coated substrates. in Research Trends in Contemporary Materials Science Trans Tech Publications Ltd, Durnten-Zurich., 555, 315-+. https://doi.org/10.4028/www.scientific.net/MSF.555.315
Branković Z, Branković G, Vojisavljević K, Počuča-Nešić M, Srećković T, Vasiljević-Radović D. Microstructural properties of PZT thin films deposited on LaNiO3-coated substrates. in Research Trends in Contemporary Materials Science. 2007;555:315-+. doi:10.4028/www.scientific.net/MSF.555.315 .
Branković, Zorica, Branković, Goran, Vojisavljević, Katarina, Počuča-Nešić, Milica, Srećković, Tatjana, Vasiljević-Radović, Dana, "Microstructural properties of PZT thin films deposited on LaNiO3-coated substrates" in Research Trends in Contemporary Materials Science, 555 (2007):315-+, https://doi.org/10.4028/www.scientific.net/MSF.555.315 . .