Optimization of processing parameters for preparation of LaNiO3 thin films from the citrate precursors
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2007
Authors
Počuča-Nešić, Milica
Branković, Goran

Branković, Zorica

Vasiljević-Radović, Dana

Poleti, Dejan
Article (Published version)

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Lanthanum nickel oxide (LaNiO3) is an electrically conductive ceramics, which has a potential use as electrode for ferroelectric thin films, multilayer actuators and many other electronic devices. In this work, LaNiO3 thin films were prepared by a modified Pechini process, based on polymeric citrate precursors. DTA analysis of the precursor solution showed that formation and crystallization of LaNiO3 were completed up to 790 degrees C. Films were deposited using spin-on technique and thermally treated in temperature range 600-800 degrees C, with heating rate of 1 degrees/min. Processing parameters, such as concentration and annealing temperature, as well as number of deposited layers were optimized to achieve desired film quality. The structure of LaNiO3 was confirmed by X-ray diffraction analysis, whereas microstructural parameters, such as grain size and roughness, were analyzed by AFM.
Keywords:
precursors-organic / LaNiO3 / filmsSource:
Journal of the European Ceramic Society, 2007, 27, 2-3, 1083-1086Publisher:
- Elsevier Sci Ltd, Oxford
DOI: 10.1016/j.jeurceramsoc.2006.05.021
ISSN: 0955-2219
WoS: 000243265100113
Scopus: 2-s2.0-33751006974
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Institut za multidisciplinarna istraživanjaTY - JOUR AU - Počuča-Nešić, Milica AU - Branković, Goran AU - Branković, Zorica AU - Vasiljević-Radović, Dana AU - Poleti, Dejan PY - 2007 UR - http://rimsi.imsi.bg.ac.rs/handle/123456789/204 AB - Lanthanum nickel oxide (LaNiO3) is an electrically conductive ceramics, which has a potential use as electrode for ferroelectric thin films, multilayer actuators and many other electronic devices. In this work, LaNiO3 thin films were prepared by a modified Pechini process, based on polymeric citrate precursors. DTA analysis of the precursor solution showed that formation and crystallization of LaNiO3 were completed up to 790 degrees C. Films were deposited using spin-on technique and thermally treated in temperature range 600-800 degrees C, with heating rate of 1 degrees/min. Processing parameters, such as concentration and annealing temperature, as well as number of deposited layers were optimized to achieve desired film quality. The structure of LaNiO3 was confirmed by X-ray diffraction analysis, whereas microstructural parameters, such as grain size and roughness, were analyzed by AFM. PB - Elsevier Sci Ltd, Oxford T2 - Journal of the European Ceramic Society T1 - Optimization of processing parameters for preparation of LaNiO3 thin films from the citrate precursors EP - 1086 IS - 2-3 SP - 1083 VL - 27 DO - 10.1016/j.jeurceramsoc.2006.05.021 ER -
@article{ author = "Počuča-Nešić, Milica and Branković, Goran and Branković, Zorica and Vasiljević-Radović, Dana and Poleti, Dejan", year = "2007", abstract = "Lanthanum nickel oxide (LaNiO3) is an electrically conductive ceramics, which has a potential use as electrode for ferroelectric thin films, multilayer actuators and many other electronic devices. In this work, LaNiO3 thin films were prepared by a modified Pechini process, based on polymeric citrate precursors. DTA analysis of the precursor solution showed that formation and crystallization of LaNiO3 were completed up to 790 degrees C. Films were deposited using spin-on technique and thermally treated in temperature range 600-800 degrees C, with heating rate of 1 degrees/min. Processing parameters, such as concentration and annealing temperature, as well as number of deposited layers were optimized to achieve desired film quality. The structure of LaNiO3 was confirmed by X-ray diffraction analysis, whereas microstructural parameters, such as grain size and roughness, were analyzed by AFM.", publisher = "Elsevier Sci Ltd, Oxford", journal = "Journal of the European Ceramic Society", title = "Optimization of processing parameters for preparation of LaNiO3 thin films from the citrate precursors", pages = "1086-1083", number = "2-3", volume = "27", doi = "10.1016/j.jeurceramsoc.2006.05.021" }
Počuča-Nešić, M., Branković, G., Branković, Z., Vasiljević-Radović, D.,& Poleti, D.. (2007). Optimization of processing parameters for preparation of LaNiO3 thin films from the citrate precursors. in Journal of the European Ceramic Society Elsevier Sci Ltd, Oxford., 27(2-3), 1083-1086. https://doi.org/10.1016/j.jeurceramsoc.2006.05.021
Počuča-Nešić M, Branković G, Branković Z, Vasiljević-Radović D, Poleti D. Optimization of processing parameters for preparation of LaNiO3 thin films from the citrate precursors. in Journal of the European Ceramic Society. 2007;27(2-3):1083-1086. doi:10.1016/j.jeurceramsoc.2006.05.021 .
Počuča-Nešić, Milica, Branković, Goran, Branković, Zorica, Vasiljević-Radović, Dana, Poleti, Dejan, "Optimization of processing parameters for preparation of LaNiO3 thin films from the citrate precursors" in Journal of the European Ceramic Society, 27, no. 2-3 (2007):1083-1086, https://doi.org/10.1016/j.jeurceramsoc.2006.05.021 . .