New Electronic Interface Circuits for Humidity Measurement Based on the Current Processing Technique

Abstract

The paper describes a new electronic conditioning circuit based on the current-processing technique for accurate and reliable humidity measurement, without post-processing requirements. Pseudobrookite nanocrystalline (Fe2TiO5) thick film was used as capacitive humidity transducer in the proposed design. The interface integrated circuit was realized in TSMC 0.18 mu m CMOS technology, but commercial devices were used for practical realization. The sensing principle of the sensor was obtained by converting the information on environment humidity into a frequency variable square-wave electric current signal. The proposed solution features high linearity, insensitivity to temperature, as well as low power consumption. The sensor has a linear function with relative humidity in the range of Relative Humidity (RH) 30-90 %, error below 1.5 %, and sensitivity 8.3 x 10(14) Hz/F evaluated over the full range of changes. A fast recovery without the need of any refreshing methods was observed with a change in RH. The total power dissipation of readout circuitry was 1 mW.