Fabrication of BaTiO3-based thin film heterostructures with ring electrodes by low cost deposition techniques
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2019
Authors
Vukmirović, Jelena
Nesterović, Andrea

Stijepović, Ivan

Milanović, Marija

Omerović, Nejra

Bajac, Branimir

Bobić, Jelena

Srdic, Vladimir V.
Article (Published version)

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In this paper the fabrication of BaTiO3-based thin film heterostructures with ring silver electrodes by low cost deposition techniques was investigated. BaTiO3, Ba1-xSrxTiO3 (x = 0.1, 0.2, 0.3, 0.4) and BaTi1-xZrxO3 (x = 0.1, 0.2) thin films for potential application in microwave technologies were prepared by chemical solution deposition method on Pt-coated silicon substrates and sintered at different temperatures. The prepared films were examined by SEM, AFM, XRD and Raman spectroscopy in order to study the influence of dopants on microstructure and phase changes. Dielectric and ferroelectric properties of the doped BaTiO3 thin films were also investigated to find the optimal composition and structure for tunable application. Complex shaped silver electrodes suitable for measurements of tunability at GHz frequencies were prepared by inkjet printing method. The electrodes with circular shape were printed on the surface of BaTiO3 based thin films by Dimatix inkjet printer. Precision lim...its of the method and the influence of printing conditions on electrode size and quality were also investigated.
Keywords:
Thin films / Solution deposition / Inkjet printing / Ferroelectric propertiesSource:
Journal of Materials Science-Materials in Electronics, 2019, 30, 16, 14995-15004Publisher:
- Springer, Dordrecht
Funding / projects:
DOI: 10.1007/s10854-019-01872-2
ISSN: 0957-4522
WoS: 000480558400019
Scopus: 2-s2.0-85069950020
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Institut za multidisciplinarna istraživanjaTY - JOUR AU - Vukmirović, Jelena AU - Nesterović, Andrea AU - Stijepović, Ivan AU - Milanović, Marija AU - Omerović, Nejra AU - Bajac, Branimir AU - Bobić, Jelena AU - Srdic, Vladimir V. PY - 2019 UR - http://rimsi.imsi.bg.ac.rs/handle/123456789/1227 AB - In this paper the fabrication of BaTiO3-based thin film heterostructures with ring silver electrodes by low cost deposition techniques was investigated. BaTiO3, Ba1-xSrxTiO3 (x = 0.1, 0.2, 0.3, 0.4) and BaTi1-xZrxO3 (x = 0.1, 0.2) thin films for potential application in microwave technologies were prepared by chemical solution deposition method on Pt-coated silicon substrates and sintered at different temperatures. The prepared films were examined by SEM, AFM, XRD and Raman spectroscopy in order to study the influence of dopants on microstructure and phase changes. Dielectric and ferroelectric properties of the doped BaTiO3 thin films were also investigated to find the optimal composition and structure for tunable application. Complex shaped silver electrodes suitable for measurements of tunability at GHz frequencies were prepared by inkjet printing method. The electrodes with circular shape were printed on the surface of BaTiO3 based thin films by Dimatix inkjet printer. Precision limits of the method and the influence of printing conditions on electrode size and quality were also investigated. PB - Springer, Dordrecht T2 - Journal of Materials Science-Materials in Electronics T1 - Fabrication of BaTiO3-based thin film heterostructures with ring electrodes by low cost deposition techniques EP - 15004 IS - 16 SP - 14995 VL - 30 DO - 10.1007/s10854-019-01872-2 ER -
@article{ author = "Vukmirović, Jelena and Nesterović, Andrea and Stijepović, Ivan and Milanović, Marija and Omerović, Nejra and Bajac, Branimir and Bobić, Jelena and Srdic, Vladimir V.", year = "2019", abstract = "In this paper the fabrication of BaTiO3-based thin film heterostructures with ring silver electrodes by low cost deposition techniques was investigated. BaTiO3, Ba1-xSrxTiO3 (x = 0.1, 0.2, 0.3, 0.4) and BaTi1-xZrxO3 (x = 0.1, 0.2) thin films for potential application in microwave technologies were prepared by chemical solution deposition method on Pt-coated silicon substrates and sintered at different temperatures. The prepared films were examined by SEM, AFM, XRD and Raman spectroscopy in order to study the influence of dopants on microstructure and phase changes. Dielectric and ferroelectric properties of the doped BaTiO3 thin films were also investigated to find the optimal composition and structure for tunable application. Complex shaped silver electrodes suitable for measurements of tunability at GHz frequencies were prepared by inkjet printing method. The electrodes with circular shape were printed on the surface of BaTiO3 based thin films by Dimatix inkjet printer. Precision limits of the method and the influence of printing conditions on electrode size and quality were also investigated.", publisher = "Springer, Dordrecht", journal = "Journal of Materials Science-Materials in Electronics", title = "Fabrication of BaTiO3-based thin film heterostructures with ring electrodes by low cost deposition techniques", pages = "15004-14995", number = "16", volume = "30", doi = "10.1007/s10854-019-01872-2" }
Vukmirović, J., Nesterović, A., Stijepović, I., Milanović, M., Omerović, N., Bajac, B., Bobić, J.,& Srdic, V. V.. (2019). Fabrication of BaTiO3-based thin film heterostructures with ring electrodes by low cost deposition techniques. in Journal of Materials Science-Materials in Electronics Springer, Dordrecht., 30(16), 14995-15004. https://doi.org/10.1007/s10854-019-01872-2
Vukmirović J, Nesterović A, Stijepović I, Milanović M, Omerović N, Bajac B, Bobić J, Srdic VV. Fabrication of BaTiO3-based thin film heterostructures with ring electrodes by low cost deposition techniques. in Journal of Materials Science-Materials in Electronics. 2019;30(16):14995-15004. doi:10.1007/s10854-019-01872-2 .
Vukmirović, Jelena, Nesterović, Andrea, Stijepović, Ivan, Milanović, Marija, Omerović, Nejra, Bajac, Branimir, Bobić, Jelena, Srdic, Vladimir V., "Fabrication of BaTiO3-based thin film heterostructures with ring electrodes by low cost deposition techniques" in Journal of Materials Science-Materials in Electronics, 30, no. 16 (2019):14995-15004, https://doi.org/10.1007/s10854-019-01872-2 . .