In this work, we prepared zinc stannate (ZTO) thin films by RF sputtering starting from a sintered ceramic target with Zn:Sn ratio 2:1, by varying the argon/oxygen pressures during the deposition process. Thin films were deposited on alumina substrates at 400 degrees C, and subsequently annealed at 600 degrees C in the air. The transparency typical for the as-deposited films was preserved even after their annealing at 600 degrees C in the air, where the high temperature was crucial for the improvement of the crystalline Zn2SnO4 , ZTO phase, as confirmed by Raman measurements. Additionally, the post-deposition thermal treatment resulted in porous ZTO films suitable for gas sensing application. The structural and surface morphological properties of thin films were investigated by Raman spectroscopy, field emission scanning electron microscopy (FE-SEM) and energy dispersive X-ray analysis (EDX). Finally, the gas sensing properties towards nitrogen dioxide, ethanol and acetone have been te...sted, showing the high potentiality of this material as the gas sensor for ethanol and acetone at 400 degrees C, and nitrogen dioxide at 200 degrees C.
Keywords:
Zn2SnO4 thin film / Nitrogen dioxide / Gas sensor / Ethanol / Acetone
Source:
Materials Science in Semiconductor Processing, 2017, 71, 461-469
Publisher:
Elsevier Sci Ltd, Oxford
Funding / projects:
Slovenian Research AgencySlovenian Research Agency - Slovenia [P2-0105]
TY - JOUR
AU - Saeedabad, S. Hemmatzadeh
AU - Baratto, C.
AU - Rigoni, F.
AU - Rozati, S. M.
AU - Sberveglieri, G.
AU - Vojisavljević, Katarina
AU - Malic, Barbara
PY - 2017
UR - http://rimsi.imsi.bg.ac.rs/handle/123456789/1024
AB - In this work, we prepared zinc stannate (ZTO) thin films by RF sputtering starting from a sintered ceramic target with Zn:Sn ratio 2:1, by varying the argon/oxygen pressures during the deposition process. Thin films were deposited on alumina substrates at 400 degrees C, and subsequently annealed at 600 degrees C in the air. The transparency typical for the as-deposited films was preserved even after their annealing at 600 degrees C in the air, where the high temperature was crucial for the improvement of the crystalline Zn2SnO4 , ZTO phase, as confirmed by Raman measurements. Additionally, the post-deposition thermal treatment resulted in porous ZTO films suitable for gas sensing application. The structural and surface morphological properties of thin films were investigated by Raman spectroscopy, field emission scanning electron microscopy (FE-SEM) and energy dispersive X-ray analysis (EDX). Finally, the gas sensing properties towards nitrogen dioxide, ethanol and acetone have been tested, showing the high potentiality of this material as the gas sensor for ethanol and acetone at 400 degrees C, and nitrogen dioxide at 200 degrees C.
PB - Elsevier Sci Ltd, Oxford
T2 - Materials Science in Semiconductor Processing
T1 - Gas sensing applications of the inverse spinel zinc tin oxide
EP - 469
SP - 461
VL - 71
DO - 10.1016/j.mssp.2017.09.006
ER -
@article{
author = "Saeedabad, S. Hemmatzadeh and Baratto, C. and Rigoni, F. and Rozati, S. M. and Sberveglieri, G. and Vojisavljević, Katarina and Malic, Barbara",
year = "2017",
abstract = "In this work, we prepared zinc stannate (ZTO) thin films by RF sputtering starting from a sintered ceramic target with Zn:Sn ratio 2:1, by varying the argon/oxygen pressures during the deposition process. Thin films were deposited on alumina substrates at 400 degrees C, and subsequently annealed at 600 degrees C in the air. The transparency typical for the as-deposited films was preserved even after their annealing at 600 degrees C in the air, where the high temperature was crucial for the improvement of the crystalline Zn2SnO4 , ZTO phase, as confirmed by Raman measurements. Additionally, the post-deposition thermal treatment resulted in porous ZTO films suitable for gas sensing application. The structural and surface morphological properties of thin films were investigated by Raman spectroscopy, field emission scanning electron microscopy (FE-SEM) and energy dispersive X-ray analysis (EDX). Finally, the gas sensing properties towards nitrogen dioxide, ethanol and acetone have been tested, showing the high potentiality of this material as the gas sensor for ethanol and acetone at 400 degrees C, and nitrogen dioxide at 200 degrees C.",
publisher = "Elsevier Sci Ltd, Oxford",
journal = "Materials Science in Semiconductor Processing",
title = "Gas sensing applications of the inverse spinel zinc tin oxide",
pages = "469-461",
volume = "71",
doi = "10.1016/j.mssp.2017.09.006"
}
Saeedabad, S. H., Baratto, C., Rigoni, F., Rozati, S. M., Sberveglieri, G., Vojisavljević, K.,& Malic, B.. (2017). Gas sensing applications of the inverse spinel zinc tin oxide. in Materials Science in Semiconductor Processing
Elsevier Sci Ltd, Oxford., 71, 461-469.
https://doi.org/10.1016/j.mssp.2017.09.006
Saeedabad SH, Baratto C, Rigoni F, Rozati SM, Sberveglieri G, Vojisavljević K, Malic B. Gas sensing applications of the inverse spinel zinc tin oxide. in Materials Science in Semiconductor Processing. 2017;71:461-469.
doi:10.1016/j.mssp.2017.09.006 .
Saeedabad, S. Hemmatzadeh, Baratto, C., Rigoni, F., Rozati, S. M., Sberveglieri, G., Vojisavljević, Katarina, Malic, Barbara, "Gas sensing applications of the inverse spinel zinc tin oxide" in Materials Science in Semiconductor Processing, 71 (2017):461-469,
https://doi.org/10.1016/j.mssp.2017.09.006 . .
