TY  - JOUR
AU  - Branković, Zorica
AU  - Branković, Goran
AU  - Vojisavljević, Katarina
AU  - Pǒǔa, M.
AU  - Srećković, Tatjana
AU  - Vasiljević-Radović, Dana
PY  - 2007
UR  - http://rimsi.imsi.bg.ac.rs/handle/123456789/217
AB  - The modified polymeric precursor method (Pechini method) was successfully used for the preparation of epitaxial and polycrystalline ferroelectric Pb(Zr0.52Ti0.48)O3 (PZT) thin films. Films were deposited on LaNiO3 (LNO) - coated silicium (1 0 0) and platinum substrates (Pt (1 1 1)/Ti/SiO2/Si) by spin coating technique. LNO electrodes were also prepared by the Pechini method and treated under different thermal treatment conditions to obtain films with different structural and microstructural properties. Investigation of PZT microstructure was performed as a function of orientation and morphology of the bottom electrode, as well as of thermal treatment conditions. Grain size and morphology were analyzed by AFM, while the quality and orientation of PZT films were determined by GDCRD analysis. It has been found that the proposed thermal treatment on a hot plate, with slow heating rate and long annealing time, can result in the formation of epitaxial PZT films on Si and LNO-coated Si substrates.
PB  - Trans Tech Publications Ltd
T2  - Materials Science Forum
T1  - Microstructural properties of PZT thin films deposited on LaNIQ 3-coated substrates
EP  - 320
SP  - 315
VL  - 555
DO  - 10.4028/0-87849-441-3.315
ER  - 

@article{
author = "Branković, Zorica and Branković, Goran and Vojisavljević, Katarina and Pǒǔa, M. and Srećković, Tatjana and Vasiljević-Radović, Dana",
year = "2007",
abstract = "The modified polymeric precursor method (Pechini method) was successfully used for the preparation of epitaxial and polycrystalline ferroelectric Pb(Zr0.52Ti0.48)O3 (PZT) thin films. Films were deposited on LaNiO3 (LNO) - coated silicium (1 0 0) and platinum substrates (Pt (1 1 1)/Ti/SiO2/Si) by spin coating technique. LNO electrodes were also prepared by the Pechini method and treated under different thermal treatment conditions to obtain films with different structural and microstructural properties. Investigation of PZT microstructure was performed as a function of orientation and morphology of the bottom electrode, as well as of thermal treatment conditions. Grain size and morphology were analyzed by AFM, while the quality and orientation of PZT films were determined by GDCRD analysis. It has been found that the proposed thermal treatment on a hot plate, with slow heating rate and long annealing time, can result in the formation of epitaxial PZT films on Si and LNO-coated Si substrates.",
publisher = "Trans Tech Publications Ltd",
journal = "Materials Science Forum",
title = "Microstructural properties of PZT thin films deposited on LaNIQ 3-coated substrates",
pages = "320-315",
volume = "555",
doi = "10.4028/0-87849-441-3.315"
}

Branković, Z., Branković, G., Vojisavljević, K., Pǒǔa, M., Srećković, T.,& Vasiljević-Radović, D.. (2007). Microstructural properties of PZT thin films deposited on LaNIQ 3-coated substrates. in Materials Science Forum
Trans Tech Publications Ltd., 555, 315-320.
https://doi.org/10.4028/0-87849-441-3.315

Branković Z, Branković G, Vojisavljević K, Pǒǔa M, Srećković T, Vasiljević-Radović D. Microstructural properties of PZT thin films deposited on LaNIQ 3-coated substrates. in Materials Science Forum. 2007;555:315-320.
doi:10.4028/0-87849-441-3.315 .

Branković, Zorica, Branković, Goran, Vojisavljević, Katarina, Pǒǔa, M., Srećković, Tatjana, Vasiljević-Radović, Dana, "Microstructural properties of PZT thin films deposited on LaNIQ 3-coated substrates" in Materials Science Forum, 555 (2007):315-320,
https://doi.org/10.4028/0-87849-441-3.315 . .