Preparation of ultrathin PZT films by a chemical solution deposition method from a polymeric citrate precursor
Samo za registrovane korisnike
2010
Autori
Vojisavljević, KatarinaBranković, Goran
Srećković, Tatjana
Recnik, Aleksander
Branković, Zorica
Članak u časopisu (Objavljena verzija)
Metapodaci
Prikaz svih podataka o dokumentuApstrakt
Ultrathin PZT film was prepared using a chemical solution deposition method from polymeric citrate precursors. The PZT solution was spin-coated on an amorphous silica layer formed on a Si(l 0 0) substrate. The films were thermally treated from the substrate side with a low heating rate (1 degrees/min) up to 700 degrees C and finally annealed for 10 h. Ultrathin PZT films without microstructural instability were prepared in spite of high temperature and long annealing time. AFM and HRTEM investigations revealed the formation of a well-developed dense microstructure consisting of spherical crystallites (4-7 nm). Low roughness (2.2 nm) of a similar to 26 nm thick layer was obtained for a two-layered PZT film. The grazing incidence X-ray diffraction (GIXRD) measurements confirmed the polycrystalline structure of ultrathin PZT films. Also, GIXRD and electron energy dispersive X-ray (EDS) analysis showed that compositional variations were smaller than expected, in spite of the long annealing... time.
Ključne reči:
PZT / Precursors-organic / Films / Electron microscopyIzvor:
Journal of the European Ceramic Society, 2010, 30, 2, 485-488Izdavač:
- Elsevier Sci Ltd, Oxford
DOI: 10.1016/j.jeurceramsoc.2009.07.023
ISSN: 0955-2219
WoS: 000272455600063
Scopus: 2-s2.0-70449519170
Institucija/grupa
Institut za multidisciplinarna istraživanjaTY - JOUR AU - Vojisavljević, Katarina AU - Branković, Goran AU - Srećković, Tatjana AU - Recnik, Aleksander AU - Branković, Zorica PY - 2010 UR - http://rimsi.imsi.bg.ac.rs/handle/123456789/423 AB - Ultrathin PZT film was prepared using a chemical solution deposition method from polymeric citrate precursors. The PZT solution was spin-coated on an amorphous silica layer formed on a Si(l 0 0) substrate. The films were thermally treated from the substrate side with a low heating rate (1 degrees/min) up to 700 degrees C and finally annealed for 10 h. Ultrathin PZT films without microstructural instability were prepared in spite of high temperature and long annealing time. AFM and HRTEM investigations revealed the formation of a well-developed dense microstructure consisting of spherical crystallites (4-7 nm). Low roughness (2.2 nm) of a similar to 26 nm thick layer was obtained for a two-layered PZT film. The grazing incidence X-ray diffraction (GIXRD) measurements confirmed the polycrystalline structure of ultrathin PZT films. Also, GIXRD and electron energy dispersive X-ray (EDS) analysis showed that compositional variations were smaller than expected, in spite of the long annealing time. PB - Elsevier Sci Ltd, Oxford T2 - Journal of the European Ceramic Society T1 - Preparation of ultrathin PZT films by a chemical solution deposition method from a polymeric citrate precursor EP - 488 IS - 2 SP - 485 VL - 30 DO - 10.1016/j.jeurceramsoc.2009.07.023 ER -
@article{ author = "Vojisavljević, Katarina and Branković, Goran and Srećković, Tatjana and Recnik, Aleksander and Branković, Zorica", year = "2010", abstract = "Ultrathin PZT film was prepared using a chemical solution deposition method from polymeric citrate precursors. The PZT solution was spin-coated on an amorphous silica layer formed on a Si(l 0 0) substrate. The films were thermally treated from the substrate side with a low heating rate (1 degrees/min) up to 700 degrees C and finally annealed for 10 h. Ultrathin PZT films without microstructural instability were prepared in spite of high temperature and long annealing time. AFM and HRTEM investigations revealed the formation of a well-developed dense microstructure consisting of spherical crystallites (4-7 nm). Low roughness (2.2 nm) of a similar to 26 nm thick layer was obtained for a two-layered PZT film. The grazing incidence X-ray diffraction (GIXRD) measurements confirmed the polycrystalline structure of ultrathin PZT films. Also, GIXRD and electron energy dispersive X-ray (EDS) analysis showed that compositional variations were smaller than expected, in spite of the long annealing time.", publisher = "Elsevier Sci Ltd, Oxford", journal = "Journal of the European Ceramic Society", title = "Preparation of ultrathin PZT films by a chemical solution deposition method from a polymeric citrate precursor", pages = "488-485", number = "2", volume = "30", doi = "10.1016/j.jeurceramsoc.2009.07.023" }
Vojisavljević, K., Branković, G., Srećković, T., Recnik, A.,& Branković, Z.. (2010). Preparation of ultrathin PZT films by a chemical solution deposition method from a polymeric citrate precursor. in Journal of the European Ceramic Society Elsevier Sci Ltd, Oxford., 30(2), 485-488. https://doi.org/10.1016/j.jeurceramsoc.2009.07.023
Vojisavljević K, Branković G, Srećković T, Recnik A, Branković Z. Preparation of ultrathin PZT films by a chemical solution deposition method from a polymeric citrate precursor. in Journal of the European Ceramic Society. 2010;30(2):485-488. doi:10.1016/j.jeurceramsoc.2009.07.023 .
Vojisavljević, Katarina, Branković, Goran, Srećković, Tatjana, Recnik, Aleksander, Branković, Zorica, "Preparation of ultrathin PZT films by a chemical solution deposition method from a polymeric citrate precursor" in Journal of the European Ceramic Society, 30, no. 2 (2010):485-488, https://doi.org/10.1016/j.jeurceramsoc.2009.07.023 . .