Tailoring and characterization of porous hierarchical nanostructured p type thin film of Cu-Al-Oxide for the detection of pollutant gases
Apstrakt
An experimental approach for the detection of harmful gases in presence of humidity has been applied for gas sensors based on p-type Cu-Al-Oxide thin films. The impact of deposition conditions on the surface, morphology and sensing properties of the semiconducting oxide thin films are investigated. Cu-Al-Oxide thin film with higher resistance can be applied as p-type resistive gas sensor for the detection of pollutant gases. Thin films were characterized by X-Ray Diffraction, scanning electron microscope, and Raman spectroscopy. We observed that inert atmosphere and deposition temperature play the important role to affect the structural and surface morphology of Cu-Al-Oxide thin films. Sensitivity of nanostructured thin films towards reducing and oxidizing gas are studied as a function of gas concentration and operating temperature.
Ključne reči:
RF sputtering / p-type transparent conducting oxides / gas sensor / Delafossite / Cu-Al-OxideIzvor:
28th European Conference on Solid-State Transducers (Eurosensors 2014), 2014, 87, 252-255Izdavač:
- Elsevier Science Bv, Amsterdam
DOI: 10.1016/j.proeng.2014.11.651
ISSN: 1877-7058
WoS: 000369531700061
Scopus: 2-s2.0-84923319733
Institucija/grupa
Institut za multidisciplinarna istraživanjaTY - JOUR AU - Kumar, R. AU - Baratto, C. AU - Faglia, G. AU - Sberveglieri, G. AU - Vojisavljević, Katarina AU - Malic, Barbara PY - 2014 UR - http://rimsi.imsi.bg.ac.rs/handle/123456789/797 AB - An experimental approach for the detection of harmful gases in presence of humidity has been applied for gas sensors based on p-type Cu-Al-Oxide thin films. The impact of deposition conditions on the surface, morphology and sensing properties of the semiconducting oxide thin films are investigated. Cu-Al-Oxide thin film with higher resistance can be applied as p-type resistive gas sensor for the detection of pollutant gases. Thin films were characterized by X-Ray Diffraction, scanning electron microscope, and Raman spectroscopy. We observed that inert atmosphere and deposition temperature play the important role to affect the structural and surface morphology of Cu-Al-Oxide thin films. Sensitivity of nanostructured thin films towards reducing and oxidizing gas are studied as a function of gas concentration and operating temperature. PB - Elsevier Science Bv, Amsterdam T2 - 28th European Conference on Solid-State Transducers (Eurosensors 2014) T1 - Tailoring and characterization of porous hierarchical nanostructured p type thin film of Cu-Al-Oxide for the detection of pollutant gases EP - 255 SP - 252 VL - 87 DO - 10.1016/j.proeng.2014.11.651 ER -
@article{ author = "Kumar, R. and Baratto, C. and Faglia, G. and Sberveglieri, G. and Vojisavljević, Katarina and Malic, Barbara", year = "2014", abstract = "An experimental approach for the detection of harmful gases in presence of humidity has been applied for gas sensors based on p-type Cu-Al-Oxide thin films. The impact of deposition conditions on the surface, morphology and sensing properties of the semiconducting oxide thin films are investigated. Cu-Al-Oxide thin film with higher resistance can be applied as p-type resistive gas sensor for the detection of pollutant gases. Thin films were characterized by X-Ray Diffraction, scanning electron microscope, and Raman spectroscopy. We observed that inert atmosphere and deposition temperature play the important role to affect the structural and surface morphology of Cu-Al-Oxide thin films. Sensitivity of nanostructured thin films towards reducing and oxidizing gas are studied as a function of gas concentration and operating temperature.", publisher = "Elsevier Science Bv, Amsterdam", journal = "28th European Conference on Solid-State Transducers (Eurosensors 2014)", title = "Tailoring and characterization of porous hierarchical nanostructured p type thin film of Cu-Al-Oxide for the detection of pollutant gases", pages = "255-252", volume = "87", doi = "10.1016/j.proeng.2014.11.651" }
Kumar, R., Baratto, C., Faglia, G., Sberveglieri, G., Vojisavljević, K.,& Malic, B.. (2014). Tailoring and characterization of porous hierarchical nanostructured p type thin film of Cu-Al-Oxide for the detection of pollutant gases. in 28th European Conference on Solid-State Transducers (Eurosensors 2014) Elsevier Science Bv, Amsterdam., 87, 252-255. https://doi.org/10.1016/j.proeng.2014.11.651
Kumar R, Baratto C, Faglia G, Sberveglieri G, Vojisavljević K, Malic B. Tailoring and characterization of porous hierarchical nanostructured p type thin film of Cu-Al-Oxide for the detection of pollutant gases. in 28th European Conference on Solid-State Transducers (Eurosensors 2014). 2014;87:252-255. doi:10.1016/j.proeng.2014.11.651 .
Kumar, R., Baratto, C., Faglia, G., Sberveglieri, G., Vojisavljević, Katarina, Malic, Barbara, "Tailoring and characterization of porous hierarchical nanostructured p type thin film of Cu-Al-Oxide for the detection of pollutant gases" in 28th European Conference on Solid-State Transducers (Eurosensors 2014), 87 (2014):252-255, https://doi.org/10.1016/j.proeng.2014.11.651 . .